Hexachlorodisilane, Cas #13465-77-5

Hexachlorodisilane, Cas #13465-77-5, Cl₆Si₂, molecular weight 268.89. Hexachlorodisilane is a clear coloress, corrosive liquid, known as HCDS, which is stable but reacts violently with water. HCDS is used as a spacer in litho for double, triple, and quadruple pattering (pitch doubling etc.). Also used as a sidewall spacer in advanced logic transistors- planar structures. Used as representative material for all advanced spacers (amino silane types- LTO and SAM)

 Hexachlorodisilane is also used in the semiconductor industry for manufacturing fiber optics and solar energu products. HCDS is also used as a reducing reagent and is the most powerful deoxygenating agent. ALD and CVD methods help develop Silicon Nitride and Silicon Dioxide. Hexachlorodisilane is a chemical used in the ALD process which will help increase the production of Silicon Nitride and Silicon Dioxide.

General Information on Hexachlorodisilane

CAS No. : 13465-77-5

Synonym : HCDS

Properties of Hexachlorodisilane

Appearance/Form: Clear, colorless Liquid

Formula: Cl₆Si₂

Molecular Weight: 268.89

BP: 144 - 145.5 °C

MP: -1 °C

Density: 1.562 g/mL at 25 °C (77 °F)

Vapor Pressure: 12 mm Hg at 40 °C

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Beta Nitrostyrene series

CAS #	Chemical Name
102-96-5	TRANS-BETA-NITROSTYRENE
399-25-7	2-FLUORO-BETA-NITROSTYRENE
7166-19-0	b-Bromo-b-Nitrostyrene
1485-00-3	3,4-Methylenedioxy-beta-nitrostyrene
35507-05-6	3-Benzyloxy-4-methoxy-beta-nitrostyrene
3156-34-1	2-CHLORO-BETA-NITROSTYRENE
3156-43-2	trans-2-Hydroxy-β-nitrostyrene
705-60-2	trans-β-Methyl-β-nitrostyrene
317-99-7	3-Methoxy-β-nitrostyrene
5153-71-9	1-BROMO-4-(2-NITROVINYL)BENZEN
122-47-4	3,4-DIMETHOXY-BETA-METHYL-BETA-NITROSTYRENE
5153-68-4	trans-4-Methyl-β-nitrostyrene
5153-67-3	trans-β-Nitrostyrene
6178-42-3	1-(4-HYDROXY-3-METHOXYPHENYL)-2-NITROETHENE
4230-93-7	3,4-Dimethoxy-β-nitrostyrene
3179-10-0	4-Methoxy-β-nitrostyrene
3179-09-7	3-Methoxy-β-nitrostyrene
3179-08-6	/4-Hydroxy-b-nitrostyrene
155988-33-3	trans-2-Bromo-β-nitrostyrene
206559-62-8	3-Ethoxy-2-hydroxy-b-nitrostyrene
706-08-1	4-FLUORO-b-NITROSTYRENE
5576-97-6	trans-4-Methoxy-β-nitrostyrene
40276-09-3	TRANS-2-BENZYLOXY-TRANS-B-NITROSTYRENE
1860-56-6	4-Benzyloxy-3-methoxy-β-nitrostyrene
3316-24-3	2-Methoxy-β-nitrostyrene
63909-38-6	4-Benzyloxy-3-methoxy-b-nitrostyrene
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