Hexachlorodisilane, Cas #13465-77-5

Hexachlorodisilane, Cas #13465-77-5, Cl₆Si₂, molecular weight 268.89. Hexachlorodisilane is a clear coloress, corrosive liquid, known as HCDS, which is stable but reacts violently with water. HCDS is used as a spacer in litho for double, triple, and quadruple pattering (pitch doubling etc.). Also used as a sidewall spacer in advanced logic transistors- planar structures. Used as representative material for all advanced spacers (amino silane types- LTO and SAM)

 Hexachlorodisilane is also used in the semiconductor industry for manufacturing fiber optics and solar energu products. HCDS is also used as a reducing reagent and is the most powerful deoxygenating agent. ALD and CVD methods help develop Silicon Nitride and Silicon Dioxide. Hexachlorodisilane is a chemical used in the ALD process which will help increase the production of Silicon Nitride and Silicon Dioxide.

General Information on Hexachlorodisilane

CAS No. : 13465-77-5

Synonym : HCDS

Properties of Hexachlorodisilane

Appearance/Form: Clear, colorless Liquid

Formula: Cl₆Si₂

Molecular Weight: 268.89

BP: 144 - 145.5 °C

MP: -1 °C

Density: 1.562 g/mL at 25 °C (77 °F)

Vapor Pressure: 12 mm Hg at 40 °C

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